Fundamental Theory for Magnetized Radio-Frequency Discharges between Planar Electrodes and Its Application to the ECR Case
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概要
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The most fundamental solutions for effects of static magnetic field on radio fre-quency (RF) discharges between a pair of electrodes were obtained explicitly by solv-ing a quasi-static linear Laplace equation. The magnetic field was assumed to be ap-plied in parallel with the electrode plane. In this theory', the produced plasma density,threshold conditions for variable parameters and the phase and amplitude for electricfield to maintain the discharges were formulated uniquely. These solutions were usedto extract qualitative properties on the planar Electron Cyclotron Resonance (ECR)discharges.[magetized RF discharges, geometrical resonance, plasma density determination, ll thresholds, ECRl
- 社団法人日本物理学会の論文
- 1991-12-15
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