Fundamental Solutions for Radio Frequency Discharges between Dielectric-Coverd Parallel-Plate Electrodes
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概要
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Fundamental solutions for radio frequency (RF) discharges between parallel-plateelectrodes were obtained theoretically using a quasi-static linear Laplace equation, inparticular, the produced plasma density and the rninimum RF threshold voltage formaintaining the plasma. In this theory, the plasma was assumed to be uniformly pro-duced between electrodes, and each electrode was completely covered by a dielectric.The theory shows that the mechanism for RF discharges arises from a geometricalresonance of electron plasma oscillation, The phase+ and amplilude properties for elec-tric field in plasma were also deduced qualitatively from this tlteory. This theory maybe applicable for wide ranges of gas pressure and RF frequettcy.
- 1990-09-15
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