Ion Contributions to Planar Radio-Frequency Plasmas Produced by Surface Wave
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Contribtmtions of negative and positive ions to planar radio-frequency (RF)plasmas produced by an even surface wave (SWP) traveling between a pair of semi-infinite two dielectric regions are investigated tlteoretically by solving a quasistaticLaplace equation. In tltis theory, tlte first-order apprc>ximation with respect to thewave attenuation is employed to obtain the results; (]) the density of the producedplasma decreases almost linearly with the wave propagation, (II) the produced plasmalength extends longer due to the ion contributions, and (III) several fundamental char-acteristics for the surface wave, such as RF power floxv, wave potential and electricfields, were also clarified relating to the ion contributiccns.[p1anar SWP discltarges, ion contributions, perturbation tlteory, even surface ]l mode, a characteristic functionl
- 社団法人日本物理学会の論文
- 1992-10-15
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