Proposal of Non-Cylindrical and Large-Area RF Plasma Productions by Surface Wave
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概要
- 論文の詳細を見る
- 社団法人日本物理学会の論文
- 1994-08-15
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関連論文
- Typical Characteristics of Optical Thin Film Filters with Metallic Nanoparticles
- Dispersion and Attenuation Characteristics of Electromagnetic Waves Propagating along a Plane Conductor
- Novel Optical Surface Plasmon Propagating along a Planar Metal with Nano-Dielectric Particles
- Modelling and Characteristics of Large-Area RF Plasmas Produced by Surface Wave
- Fundamental Solutions for Radio Frequency Discharges between Dielectric-Coverd Parallel-Plate Electrodes
- Remote Excitation of Electron Plasma Waves by a Modulated Laser Beam
- Observation of Resonance of a Low Frequency Surface Wave Produced Plasma Column
- Proposal of Non-Cylindrical and Large-Area RF Plasma Productions by Surface Wave
- Very Long and Large-Area RF Plasma Productions by Odd Surface Waves for Online Mass Production of Amorphous Silicon Solar Cells or Mirrors ( Plasma Processing)
- Mode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions
- Detection of Half-Wavelength Resonance of Surface Wave-Produced Plasma Column and Its Gas-Pressure Dependence
- Mode Coupling Phenomena of Longitudinal Quarter-Wavelength Resonance of a Plasma Column Produced by Surface Waves
- Ion Contributions to Planar Radio-Frequency Plasmas Produced by Surface Wave
- Propagation Characteristics and Mode Utilizability of Electromagnetic RF and Optical Surface Waves Travelling between a Pair of Metal Sheets
- Fundamental Theory for Ion Contributions to Radio Frequency Discharges between Planar Electrodes
- General Characteristics of the Maintenance Electric Fields in Planar Radio Frequency Discharges
- Fundamental Theory for Magnetized Radio-Frequency Discharges between Planar Electrodes and Its Application to the ECR Case