Fundamental Theory for Ion Contributions to Radio Frequency Discharges between Planar Electrodes
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概要
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Ion contributions in planar radio frequency (RF) discharges were disclosed by solving a quasi-static linear Laplace equation self-consistently in the stationary state. Negative ions were also taken into consideration. As the results, the produced plasma density, threshold for an applied RF voltage and the electric field in plasma to maintain the discharges were obtained definitely. The present theory may be applicable for wide ranges of gas pressures and RF frequencies.
- 社団法人応用物理学会の論文
- 1991-06-15
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