Photoemission Study on Initial Oxidation of Si Surfaces by Super-Pure Oxygen Gas
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-01-15
著者
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Kawamura Naoki
Ntt Lsi Laboratories
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Oshima Masaharu
Ntt Applied Electronics Laboratories
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Kawamura N
Nhk Sci. & Technical Res. Lab. Tokyo Jpn
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Yabumoto Norikuni
Ntt Lsi Laboratories
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SUGAHARA Hirohiko
NTT Applied Electronics Laboratories
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MINEGISHI Kazushige
NTT LSI Laboratories
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Sugahara H
Univ. Tsukuba Ibaraki Jpn
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Minegishi K
Yamanashi Univ. Kofu Jpn
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