Generation of Strongly Ionized Aluminum Plasma in a Low-Temperature Tokamak Discharge
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概要
- 論文の詳細を見る
A new technique to produce a strongly ionized plasma from aluminum metal is achieved by use of the plasma-assisted arc in a tokamak discharge with low temperature (≲10eV), high electron density (≳10^<12> cm^<-3>), and low gas pressure (10^<-5> ∼ 10^<-4> Torr). On arcing, the spectral lines of AlI, AlII and AlIII have been observed. Using the comparison spectroscopic method with no need of absolute measurement of spectral line intensity, we obtained the result that doubly ionized aluminum ions are dominant, and the density is estimated to be about 10^<11> cm^<-3>. The aluminum plasma thus produced is useful and has potential for plasma processing, such as thin-film formation of AlN.
- 社団法人応用物理学会の論文
- 1992-07-15
著者
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Hiramatsu Kenji
Department Of Anesthesiology Kinki University School Of Medicine
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Hiramatsu Kenji
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Takamura Shuichi
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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