Evaluation of GaAs/AlGaAs Double-Heterostructure Wafers and Lasers by X-ray Topography
スポンサーリンク
概要
- 論文の詳細を見る
Double-heterostructure (DH) epitaxial wafers and lasers were studied by the X-ray topographic technique before and after liquid phase epitaxial growth and device processing. Various defects, such as threading dislocations, stacking faults, spotty defects, and processinduced defects, were identified. The close correlation between the defects and the degradation features for DH lasers was also studied. It is shown that most of the defects found in the X-ray topographs cause rapid laser degradation. This evaluation technique is proved to be very effective in selecting long-lived laser chips.
- 社団法人応用物理学会の論文
- 1979-03-05
著者
-
Kawakami Tsuyoshi
Musashino Electrical Communication Laboratory N. T. T.
-
Shinoda Yukinobu
Musashino Electrical Communication Laboratory
-
Kawakami Tsuyoshi
Musashino Electrical Communication Laboratory
関連論文
- GaAs Light Emitting Diodes Fabricated on SiO_2/Si Wafers
- InGaAsP n-Channel Inversion-Mode MISFET
- Accelerated Life Test of AlGaAs-GaAs DH Lasers
- Life Test of GaAs DH Lasers at Room Temperature
- Thermal Diagnosis of Dark lines in Degraded GaAs-AlGaAs Double-Heterostructure Lasers
- Rapid Degradation in GaAs/AlGaAs Lasers Caused by Process-Induced Defects
- CVD Al_2O_3 Films on III-V Binary Semiconductors
- Evaluation of GaAs/AlGaAs Double-Heterostructure Wafers and Lasers by X-ray Topography
- X-Ray Topographic Observations of Defects on the Interface of GaAs-Al_xGa_1-xAs Epitaxial Wafers
- Single Thermal Scan DLTS Method
- Observation of Etched Features of GaAs-Al_xGa_As DH Wafer
- Selective Liquid Phase Epitaxy of AlGaAs
- Small Area Planar Nb/Nb Josephson Tunnel Junction with High Current Density
- Etch Hills at the Heterointerface in GaAs-Al_xGa_1-xAs Epitaxial Wafers Prepared by LPE
- GaAs Core Embedded in Al_xGa_As Matrix
- GaAs-AlGaAs Half-Ring Laser Fabricated by Deep Zn Diffusion
- Defect Observations of GaAs-Al_xGa_1-xAs Heterostructures by Transmission Infrared Microscopy