High Rate Deposition of Iron Films by Sputtering from Two Facing Tragets
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1977-09-05
著者
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Naoe Masahiko
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
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Naoe Masahiko
Faculty Of Engineering Tokyo Institute Of Technology
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Hoshi Youichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
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Hoshi Youichi
Faculty Of Engineering Tokyo Institute Of Technology
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Yamanaka Shun'ichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
関連論文
- Deposition of Ba Ferrite Films for Perpendicular Magnetic Recording Media Using Mixed Sputtering Gas of Xe, Ar and O_2
- Distribution of magnetic field and plasma diagnosis in facing targets sputtering apparatus
- Pt/Ti composite underlayers and Pt interlayers for Co-Cr-Ta Perpendicular magnetic recording media (マルチメディアストレージ 第6回アジア情報記録技術シンポジウム〔英文〕)
- Pt/Ti composite underlayers and Pt interlayers for Co-Cr-Ta Perpendicular Magnetic Recording Media
- Co-Cr-Ta/Pt Bilayered Films for Perpendicular Magnetic Recording Media(Special Issue on Selected Papers from the 4th Asian Symposium for Information Storage Technology)
- Variable Surface Acoustic Wave Delay Line Consisting of a Magnetic Thin Film on a LiNbO_3 Substrate : C-2: SURFACE WAVE AND MAGNETIC DEVICES
- Preparation of High-Coercivity Co-Pt Alloy Films by Target-Facing Type of High-Rate Sputtering
- Addition of SiO_2 to Increase Coercivity and Squareness Ratio of Ba Ferrite Films for Perpendicular Magnetic Recording Media(Special Issue on Selected Papers from the 4th Asian Symposium for Information Storage Technology)
- Electrical Properties of Oxygenated Amorphous Si Prepared by Ion-Beam Sputtering
- Sputtered Dielectric Thin Films with High-Refractive-Index for Optical Waveguide
- Deposition of Tantalum Thin Films by Ion Beam Sputtering
- CONTINUOUS FORMATION OF Co-Cr/Ni-Fe RECORDING TAPES BY 3 STEP TYPE OF FACING TARGETS SPUTTERING METHOD
- Deposition of Silicon Nitride Films by High Rate Reactive Sputtering : A-1: ADVANCED LITHOGRAPHY AND PROCESS
- High Rate Deposition of Iron Films by Sputtering from Two Facing Tragets
- SOME PROPOSALS OF CONFIGURATION AND PREPARATION METHODS FOR Co-Cr PERPENDICULAR MAGNETIC RECORDING MEDIA
- Control of Soft Magnetism of Co-Zr and Co-Zr-Ta Films for Backlayers in Perpendicular Magnetic Recording Media
- Deposition of Amorphous CoZrNb Films Using CMF Magnetron Sputtering Technique