Preparation of High-Coercivity Co-Pt Alloy Films by Target-Facing Type of High-Rate Sputtering
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概要
- 論文の詳細を見る
Co_<1-x>Pt_x (0≦x≦0.2) thin films were prepared by using a Target-Facing type of high-rate sputtering (TFTS). The films deposited at lower argon gas pressure P_<Ar>(≦5 m Torr) have only a low coercive force Hc (<700 Oe). However, the value of Hc for films deposited at higher P_<Ar> (≧10 m Torr) increases monotonically as the Pt content increases, and films with high Hc (>1 kOe) can be obtained at a Pt content of above 11 at%. These films, whose crystallites are oriented randomly, also have a large inplane uniaxial magnetic anistropy constant K_1 (≅2.5×10^6 erg/cc) and excellent hysteresis loop squareness (S≅0.87, S^*≅0.98).
- 社団法人応用物理学会の論文
- 1983-10-20
著者
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Naoe Masahiko
Department Of Physical Electronics Tokyo Institute Of Technology
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Naoe Masahiko
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
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Kume Minoru
Research Center Sanyo Electric Co. Ltd.
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HOSHI Youichi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Tokyo Institute of Tech
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Hoshi Youichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
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Yamanaka Shun'ichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
関連論文
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- Pt/Ti composite underlayers and Pt interlayers for Co-Cr-Ta Perpendicular Magnetic Recording Media
- Co-Cr-Ta/Pt Bilayered Films for Perpendicular Magnetic Recording Media(Special Issue on Selected Papers from the 4th Asian Symposium for Information Storage Technology)
- Preparation of High-Coercivity Co-Pt Alloy Films by Target-Facing Type of High-Rate Sputtering
- Fabrication and Recording Characteristics of Sputter-Deposited Ba-Ferrite Thin Films Deposited on Pt-Ta Underlayers for Perpendicular Magnetic Recording Media(Special Issue on Selected Papers from the 5th Asian Symposium on Information Storage Technology)
- Addition of SiO_2 to Increase Coercivity and Squareness Ratio of Ba Ferrite Films for Perpendicular Magnetic Recording Media(Special Issue on Selected Papers from the 4th Asian Symposium for Information Storage Technology)
- CONTINUOUS FORMATION OF Co-Cr/Ni-Fe RECORDING TAPES BY 3 STEP TYPE OF FACING TARGETS SPUTTERING METHOD
- High Rate Deposition of Iron Films by Sputtering from Two Facing Tragets
- SOME PROPOSALS OF CONFIGURATION AND PREPARATION METHODS FOR Co-Cr PERPENDICULAR MAGNETIC RECORDING MEDIA