Electrical Characteristics of Polycrystalline Silicon-Aluminum Oxide-Silicon Dioxide-Silicon Structure
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1974-07-05
著者
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Maeda K
Semiconductor Process Laboratory Co. Ltd.
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NAKANO Jun
Central Research Institute, Kaken Pharmaceutical Co., Ltd.
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Maeda Kazuo
Semiconductor Division Fujitsu Ltd.
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Maeda Kazuo
Semiconductor Division Fujitsu Limited
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SHIRAI Kazunari
Semiconductor Division, Fujitsu Ltd.
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NAKANO Jun
Semiconductor Division, Fujitsu Ltd.
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Shirai Kazunari
Semiconductor Division Fujitsu Ltd.
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Nakano Jun
Semiconductor Division Fujitsu Ltd.
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