Cu-Ti合金によるSi_3N_4/Si_3N_4接合体の組織と強度 : 活性金属ろうによるシリコン系セラミックスの接合の研究(第1報)

概要

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Si_3N_4 was brazed to Si_3N_4 with Cu-Ti alloys containing Ti content up to 50 at% at 1373 K for 1.8 ks in vacuum, where pressureless sintered Si_3N_4 were used. The strength of Si_3N_4/Si_3N_4 joints were measured by 4-point bending test at room temperature and elevated temperature. The microstructures and elemental distribution and reaction phases in the joining layers were investigated by means of electron probe micro-analyser and X-ray diffract-meter. The main results obtained are summarized as follows.(1) The addition of Ti content from 5 to 20 at% to the alloys effectively increases the strength of around 200 MPa for Si_3N_4/Si_3N_4 joint. The strength of the joint extremely rises with further addition of Ti, and reaches the maximum of 500 MPa or more.(2) Ti in the alloys reacts with Si_3N_4 and forms TiN and Ti_5Si_3 for Ti content from 5 to 50 at%. The formation of the compounds at the interface between Si_3N_4 and the alloy imparts the superior strength to the joint, and the distribution of Ti_5Si_3 in the alloys gives rise to the improvement of the mechanical properties of the Si_3N_4/Si_3N_4 joints.(3) The Si_3N_4/Si_3N_4 joint brazed with Cu-34 at% Ti alloy represents the high strength of 500 MPa up to testing temperature of 773 K, and the degration of strength with further increasing the temperature.
社団法人溶接学会の論文
1996-05-05