Experimental Study on Fully Integrated Active Guard Band Filters for Suppressing Substrate Noise in Sub-Micron CMOS Processes for System-on-a-Chip(Regular Section)
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概要
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This paper describes fully integrated active guard band filters for suppressing the substrate coupling noise and their noise suppression effect measured by test chip experiments. The noise cancellation circuit of the active guard band filters simply consists of an inverter and a source follower. The substrate noise suppression effect was measured by using a test chip fabricated in a 0.18μm CMOS triple-well process for system-on-a-chip. The noise with the filter was less than 5% of that without the filter and the noise suppression effect was observed from 1MHz to 200MHz by the statistical measurement of the voltage comparator. The noise suppression effect was also observed for actual digital switching noise produced by digital inverters. Configuration of the active guard band filter was investigated by simulation and it is shown that high and uniform noise suppression effect is achieved by placing the guard bands in the L-shape around the target triple-well area on the p-substrate.
- 2003-01-01
著者
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Tsukada Toshiro
Semiconductor & Integrated Circuits Group Hitachi Lid.
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Tsukada Toshiro
Semiconductor & Integrated Circuits Hitachi Ltd.:semiconductor Technology Academic Research Cent
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Makie-fukuda Keiko
Semiconductor & Integrated Circuits Hitachi Ltd.
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