Pt下地層上にスパッタしたCo-Pt合金膜の結晶構造と垂直磁気異方性

概要

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Co-Pt alloy films were sputtered on (111)- and (100)-oriented Pt underlayers. The crystal structure was analyzed by means of X-ray pole figure measurements. On (111)-oriented Pt underlayers, the crystal structure of Co-Pt alloy film was (0001)-oriented hcp when the Pt content was less than 40%, but changed to (111)-oriented fcc when the Pt content exceeded 50%. In the region between 40% and 50%, both hcp and fcc structures existed. On the other hand, the Co-Pt alloy films on (100)-oriented Pt underlayers had a (100)-oriented fcc structure. Torque measurements revealed that the perpendicular anisotropy constant K_u was relatively small in the films with the (111)- or (100)-oriented fcc structure. However, K_u was quite large in the films with the (0001)-oriented hcp structure, reaching 0.7 MJ/m^3 at a Pt content of about 30%. The perpendicular anisotropy seems to originate in the crystalline anisotropy of the hcp Co-Pt alloy.
社団法人日本磁気学会の論文
2000-01-01