Gd-Fe-Co膜における磁気異方性と保磁力(磁気記録)

概要

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Gd-Fe-Co and SiNx were prepared by magnetron sputtering using Ar or Kr gas. The sample structure consisted of glass substrate/underlayer SiNx/Gd-Fe-Co/protective layer SiN_x. When the SiN_x layers were prepared using Kr gas, the coercivity H_c of Gd-Fe-Co increased. On the other hand, when the Gd-Fe-Co layer was prepared using Kr gas, the perpendicular magnetic anisotropy K_u and H_c of Gd-Fe-Co increased. The ratio of M_sH_c to 2K_u was also increased by Kr sputtering. This means that H_c increased at a greater rate than K_u. By etching the surface of the underlayer SiN_x prior to the deposition of the Gd-Fe-Co layer, it is possible to reduce H_c without affecting K_u. By combining the Kr gas sputtering and the etching, K_u can be increased without increasing H_c. A Gd-Fe-Co layer with a periodic structure of Gd and Fe-Co has larger K_u and H_c than alloys of Gd and Fe-Co. Etching the surface of the underlayer SiN_x is also effective for reducing the H_c value of the periodic structure of Gd-Fe-Co.
社団法人日本磁気学会の論文
2007-05-01