CoCrTa/Ti/CoZrNb垂直二層膜媒体におけるTi層厚の低減と磁気特性

概要

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The effect of a Ti seed-layer on the magnetic prepeties and microstructures of CoCrTa was studied in CoCrTa/Ti/CoZrNb double-layered perpendicular recording media. It was revealed that a thin Ti film of 5 nm, deposited at a substrate temperature of 230℃, gave the most enhanced c-axis alignment perpendicular to the film plane, showing the greatest perpendicular anisotropy. This large anisotropy yielded the best magnetic and recording properties under the present experimental conditions. The readback amplitude at this Ti thickness was 3 times larger than that without the Ti layer, resulting in a higher ratio of signal to meddia noise. There was no significant loss in recording resolution due to the non-magnetic Ti space between the CoCrTa recording layer and the CoZrNb underlayer.
社団法人日本磁気学会の論文
1999-04-15