CoPtCr-SiO_2/Ru垂直磁気記録媒体のSiO_2組成と粒の孤立化(磁気記録)

概要

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Enhancement of grain isolation in CoPtCr-SiO_2/Ru perpendicular recording media is discussed in relation to SiO_2 the content and grain size of the Ru seed layer. The value of the remanence coercivity obtained by subtracting the thermal agitation effect, H_0, increases significantly with increasing SiO_2 content up to∿11 at%, indicating enhancement of the grain isolation of CoPtCr. TEM images revealed that a single CoPtCr grain grows on a Ru grain in this SiO_2 content region, and experimental results showed that the grain size of the Ru seed layer plays a dominant role in determining the grain size of CoPtCr layer. However, a further increase in SiO_2 content beyond 11 at% results in a growth of multiple CoPtCr grains on a Ru grain, leading to a decrease in H_0. The formation of the multiple CoPtCr grains was remarkable on large Ru grains. suggesting a significant reduction of the diffusion length (mobility) of SiO_2 during film deposition as a result of the increase in SiO_2 content. Both a grain size reduction and an improvement in grain size homogeneity are requried for a Ru seed layer to enhance the grain isolation in CoPtCr SiO_2 perpendicular recording media.
社団法人日本磁気学会の論文
2005-03-01