Effect of Substrate Temperature on Perpendicular Magnetic Anisotropy of Nd-Fe-B Films Prepared by RF sputtering with Subsequent Heat Treatment

概要

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NdFeB thin films possessing high coercivity and perpendicular anisotropy were prepared with high reproducibility by means of RF sputtering deposition on Mo substrates with subsequent annealing treatment. The use of glass thermal insulation between the substrates and substrate holder during deposition made it possible to produce films with improved magnetic properties. The development of the magnetic properties were then found to have some dependence on the thickness of glass insulation making such films a realization of thin film permanent magnets with magnetic field strength comparable to bulk processed magnets. The magnetic properties dependence on the thickness (t) of glass insulation has revealed the following data: Film prepared without insulation produced a randomly oriented film with coercivity (_iH_c) around 480 kA/m, remanence value (M_r) around 0.67 T, M_r/M_s = 0.48 and (BH)_<max> around 73 kJ/m^3 While on the other hand, the films on substrates with insulation thickness of t = 0.1, 0.2, 0.3, 0.6, 0.8 and 1.3 mm, magnetic properties of 47πM_r = 0.67〜O.93 T, _iH_c = 1082-1290 kA/m, M_r/M_S = 0.52〜0.96 and a (BH)_<max>= 80〜167 kJ/m^3 were found.
社団法人日本磁気学会の論文
2002-05-01