116 冷凍チャックの実用化に関する研究(第1報) : 冷凍特性とチャッキング力について(OS-4 生産加工)

概要

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It has been mainly used that wax and adhedive to chuck the thin workpieces, such as the hard brittle materials of the electronic components. These methods have defects. For instance, they cause the chipping in their processing and it is needed to clean after the process. One the other hand, the vacuum chuck and the magnetic chuck are also representative methods. However, it has some problems, such as causing the crack due to the adsorption and so on. Therefore, the freezing chuck is paid attention. The mechanism is that the workpiece is held on the freezing medium which is frozen. Owing to the method, it is possible to chuck workpieces which are non-magnetic materials, complexity shaped materials and so on without using any adhesives.In addition, It is considered that it controls the occurrence of chipping and omits the cleaning process. From this study, it became clear that the characteritics of freezing chuck and its enough holding force.
一般社団法人日本機械学会の論文
2001-03-16