320 B-C-N膜の気相合成及びその耐熱性の評価(OS 薄膜特性)

概要

論文の詳細を見る
This paper describes characteristics of DLC ,c-BN and B-C-N films grown from diamond,c-BN powder and diamond/c-BN powder mixture targets respectively. Firstly, DLC films were prepared on silicon and silica glass substrates by DC-magnetron sputtering using a sintered diamond (polycrystalline diamond, PCD) target. It was found that the optical transmittance of the DLC film grown from the PCD target with an Ar ion laser beam (wave-length = 488 nm, 514.5 nm) was about four-fold larger than that grown from a graphite target. Secondly B-C-N films were prepared from diamond and c-BN powder mixture target. The B-C-N films didn't show the significant weight change under the heat treatment test at 500 ℃ in the air, and the hardness of the B-C-N films remained constant up to 500℃, whereas the DLC films were disappeared after the test. These results suggest that the B-C-N film has the potential to be applied to the tribological coatings under relatively high temperature conditions.
一般社団法人日本機械学会の論文
2001-11-02