高分子圧電材料を用いた三次元測定機用接触式プローブの開発

概要

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In this paper, a piezoelectric tactile sensor designed to detect the contact point is proposed for a probe in coordinate measuring machines. The proposed sensor, which is composed of piezoelectric polymer film, resistance layer, and electrodes, is able to detect the contact point from an electric charge at electrodes, which is generated at the contact point. The sensor is sufficiently thin (100-150μm) and soft that it can be applied to a curved surface. A column-shaped probe utilizing the sensor for the detection of the θ-coordinate of the contact point is developed. A neural network is proposed as a method for the detection of the θ-coordinate from electric charge ratios at electrodes. Results of θ-coordinate detection obtained by experiment are not yet accurate enough to contribute to the improvement of measuring accuracy, however, they can be improved by uing electric signal with better S/N ratio.
社団法人日本機械学会の論文
1994-12-25