超音波顕微鏡による局所領域の弾性係数測定

概要

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In the present paper, a new method is suggested for the nondestructive measurement of elastic moduli in a local area (100-400 μm in diameter) by the scanning acoustic microscope (SAM). The complex V(z) curve which denotes the amplitude and phase of reflected ultrasonic waves from a specimen is measured for the variable distance through liquid occupying the space between the acoustic lens and the specimen. After inverse Fourier transform of the complex V(z), the reflectance function of the liquid-specimen interface is computed. The velocities of the longitudinal, transverse and Rayleigh waves in the specimen can be estimated from the reflectance function. Then, Young's modulus, shear modulus and Poisson's ratio of the specimen can be determined from the measured wave velocities and the density, according to the elastodynamic theory. The experimental results of six kinds of materials including alloy and ceramics agree with the elastic moduli obtained by other methods. It is shown that the present method is very useful in determining the elastic moduli in local areas.
一般社団法人日本機械学会の論文
1994-01-25