2種の表面波の分散曲線を用いた薄膜の弾性係数, 密度および膜厚の測定

概要

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In this paper, a new method is suggested for the nondestructive measurement of elastic moduli, density and thickness of film by the dispersion curves of the two kinds of surface waves. It is confirmed that the surface wave velocities (Sezawa mode and Rayleigh mode) for gold on fused quartz substrate are simultaneously determined from the reflectance function obtained by the measured complex V (z) curve. The dispersion curves of two surface waves for thin film with the thickness of approximately 0.2 μm are measured in the frequency from 240 to 400 MHz with 20 MHz incremest. The elastic moduli, density and thickness of film were simultaneously identified by computer fitting to two measured dispersion curves using the direct search method. The elastic moduli and density of film were about 10% and 7% less than those of bulk, respectively. The film thickness determined by this method is in good agreement with that observed by scanning electron microscope.
社団法人日本機械学会の論文
1998-04-26