Ar及びN_2雰囲気下でのSi_3N_4とMnとの反応

概要

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In relation to the joining of silicon nitride ceramics to metal, the reaction products and reaction mechanism between Si_3N_4 and Mn have been investigated in Ar or N_2 at temperatures from 1073 to 1573 K.Using an Si_3N_4-Mn powder mixture, the reaction rate was determined thermogravimetrically, and the reaction products were examined by X-ray diffraction. Under an Ar atmosphere, from 1223 to 1423 K, MnSiN_2, Mn_<0.815>Si_<0.185> and Mn_3Si were produced, and above 1423 K, MnSiN_2 disappeared. At higher temperatures and on prolonged heating, the silicide composition changed in the following order: Mn_<0.815>Si_<0.185>Mn_3Si, Mn_5Si_3, and MnSi. Under an N_2 atmosphere, the reaction between Mn, Si_3N_4 and N_2 produced Mn nitrides and MnSiN_2. Below 1223 K, the reaction products were Mn_6N_<2.58> and Mn_4N. At higher temperatures, MnSiN_2 appeared, while Mn nitrides disappeared. Above 1423 K, only MnSiN_2 was produced. By relating these results to TG measurements, a full understanding of the reaction mechanism between Si_3N_4 and Mn was acquired.
社団法人日本セラミックス協会の論文
1995-10-01