Ar及びN_2雰囲気下でのSi_3N_4とCoとの反応

概要

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In relation to the joining of silicon nitride ceramics to metal, the reaction products between Si3N4 and Co have been investigated under Ar or N2 atmosphere at temperatures from 1423 to 1673K. Using Si3N4-Co powder mixtures, the reaction rate was determined thermogravimetrically and the reaction products were examined by X-ray diffraction. Above 1423K, the reaction proceeded under both atmospheres. The Co-Si solid solution was formed at low temperatures. At higher temperatures and on prolonged heating, the reaction products changed in the following order: Co-Si solid solution, Co2Si, CoSi and CoSi2. Under Ar atmosphere, the formation of cobalt silicides was enhanced, because of low partial pressures of N2.
社団法人粉体粉末冶金協会の論文
1996-03-15