金属塩化物で修飾したポリメチルシラン前駆体の合成とセラミゼーション(<ゲストエディターによる特集>有機-無機変換プロセス)

概要

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Polymethylsilane (PMS) modified with titanium chloride (TiCl_4) or molybdenum chloride (MoCl_5) was pyrolyzed at various temperatures to enable a detailed investigation of stable phases formed during pyrolysis. The existence of TiSi_2 in PMS-TiCl_4 precursor and β-MoSi_2 in the PMS-MoCl_5 precursor below 1273K suggested a strong interaction between Si-H and the metal chlorides during mixing. During pyrolysis of the PMS-10mass% TiCl_4 precursor, a silicon rich Si-Ti-C state was obtained below 973K, which simultaneously formed crystalline Si, TiSi_2, and SiC phases at relatively low temperatures below 1273K. During pyrolysis of the PMS-MoCl_5 precursors, however, formation of crystalline Si and SiC phases were not accelerated, while the crystalline β-MoSi_2 or α-MoSi_2 phase was formed rapidly.
社団法人日本セラミックス協会の論文
2006-06-01