新しい有機ケイ素前駆体からのケイ素を含むアモルファス炭素の生成

概要

論文の詳細を見る
Amorphous carbon in membrane form containing a small amount of silicon uniformly in the structure was prepared by firing a new organosilicon precursor, poly(phenylsilylene)-ethynylene-1,3-phenylene-ethynylene (MSP) . The pyrolyzed products look like glassy carbon. The cross-linking processes before pyrolysis were effective to keep its shape during the heat treatment and were influenced by oxygen in an ambient atmosphere during cross-linking processes. The oxygen introduced into the precursor enhanced the cross-linking but decreased the residual weight after the pyrolysis. In the pyrolyzed products, silicon atoms appeared to distribute uniformly from the outer surface to interior core. The structure of the products was amorphous, but β-SiC precipitated beyond 1873 K.
社団法人日本セラミックス協会の論文
1996-09-01