化学修飾パーヒドロポリシラザンより合成したSi_3N_4-Ti(C, N)-Y_2O_3セラミックスの結晶化と組織形成

概要

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[Si-Y-Ti-O-C-N] multicomponent amorphous powders were synthesized by pyrolysis at 1000℃, in NH_3 flow, of chemically modified perhydropolysilazane using Y(OCH(CH_3)_2)_3 and Ti(N(CH_3)_2)_4. The [Si-Y-Ti-O-C-N] powders were fully crystallized to yield Ti(C, N) nano/micro particle-dispersed β-Si_3N_4-Y_2O_3 ceramics by hot pressing at 1800℃ in N_2. The resulting ceramics exhibited a uniform and fine-grained microstructure. Titanium in the [Si-Y-Ti-O-C-N] powders could act as a catalyst to accelerate α-/β-Si_3N_4 phase transformation as well as an in-situ source for nano/micro Ti(C, N) particles, which lead to micro-structural uniformity and grain refinement of β-Si_3N_4-Ti(C, N)-Y_2O_3 ceramics.
社団法人日本セラミックス協会の論文
2000-12-01