アルカノールアミンの改質による[Pb-Ti]系光反応性前駆体を用いたチタン酸鉛薄膜の光照射効果

概要

論文の詳細を見る
A photoreactive [Pb-Ti] precursor was successfully synthesized by chemical modification of metallo-organics with alkanolamine. The synthesized precursor showed strong absorption at wavelengths shorter than 350 nm, being effective for the absorption of ultra-violet light. Photolithographic patterning of [Pb-Ti] precursor film on MgO(100) substrate could be prepared by UV-irradiation. The patterned precursor film yielded highly oriented lead titanate (PbTiO_3) of perovskete single phase by rapid heating at 550℃. PbTiO_3 films with a thickness of about 100 nm could also be synthesized on a Pt/quartz substrate using cyclic treatments of coating/UV-irradiation. Compared with the conventional method, this synthetic method was found to be useful from the following viewpoints: (1)preparation of thicker film was possible within short time; and, (2) synthesis of PbTiO_3 single phase with a uniform microstructure could be obtained.
社団法人日本セラミックス協会の論文
2000-11-01