隙間材入りガラスディスク研磨スラリーの開発 : 脂肪酸塩の研磨性能に対する効果

概要

論文の詳細を見る
In glass disk polishing, fatty acid salts are added to Ceria Polishing Slurry for the purpose of the cost cut and the improvement in processing accuracy. A polishing performance improves by optimizing the concentration and the kind of fatty acid salts. A certain kind of fatty acid salts acts as interspace material of Ceria Polishing Slurry. In this paper, Interspace Material Polishing Slurry : ISM Slurry is proposed and the polishing performances are investigated. ISM Slurry raises a polishing performance sharply. Especially, a polishing rate improves about 50%, minute sinuosity is reduced about 40%, and the adhesion amount of resources of the glass disk surface is reduced to about 1/5. It realizes that ISM Slurry cuts cost in glass disk polishing, and makes accuracy high.
公益社団法人精密工学会の論文
2005-07-05