パターン投影方式小径穴測定装置の性能向上(第2報) : 平行平板試料の場合の実験結果と理論値との比較

概要

論文の詳細を見る
In this equipment, the inner diameter of the specimen is measured by detecting an image of a small spot reflected at the wall of the specimen. In this report, the width of the gap between parallel plates is measured instead of measuring the diameter of the hole, and the factors that cause measurement errors are analyzed experimentally. The results obtained in the experiment are compared with the theoretical results discussed in the 1st report of this work. Since it is very difficult to make a specimen with a narrow gap, a special specimen with which the width measurement errors are evaluated without measuring the gap is developed in this work. The following results are obtained. (1) The measurement errors depend on the degree of defocus of the objective lens used for detection. (2) The inner diameters measured in the middle, or the inlet or outlet of the specimen are different. The difference is small when the gap is large and the numerical aperture of the lens is large. (3) The measurement errors are influenced significantly by the degree of defocus of the objective lens used for detection when its numerical aperture is large.
公益社団法人精密工学会の論文
2001-01-05