内面溝形状測定装置の光学系に起因する測定誤差の実験的解析

概要

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The measurement error due to the optical system in a profile-measuring machine is evaluated experimentally for an inner groove fabricated in a circular hole. In this report, the method for measuring the groove fabricated on a plane surface is used, because it is difficult to produce a precise groove inside the circular hole. Even in this case, it is difficult to fabricate a groove within an error of ±0.1μm. Then, a groove composed of a middle plate and two knife-edge plates set on both sides of the middle plate is developed. The groove depth can be changed from 0 to 300μm by moving the knife-edge plates back and forth using the developed groove. Furthermore, the groove width can be changed from 0.5 to 3.0mm by changing the middle plate. The measurement error of the optical profile-measuring machine can be evaluated within an error of ±0.1μm using the developed groove.
社団法人精密工学会の論文
2004-10-05