透明導電膜上微粒子からの散乱光分布の解析

概要

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In this research, the intensity distribution of scattered light is calculated using the Maxwell equation under the conditions that particles, Iarger than 1μm in diameter adhering on to an ITO, are illuminated obliquely by a laser diode. FD-TD (Finite Difference - Time Domain) method is used to solve the Maxwell equation. The calculated intensity distribution is compared with that obtained by experiments in which the detection angles (ω) are changed from 0° to 50° . The calculated intensity distribution agrees well with the experimental intensity distribution under the conditions that, ω is 0° - 45° and NA is 0.1. The normalized detected intensity V_n increases with increasing ωbecause V_n is 6.5 at ω=45° and V_n is 27 at ω=60° under the condition that NA is 0.4,which is usually used in a conventional detection machine. The ω is required to be larger than 45° and to be as large as possible within 60° for the detection of the particles on ITO.
1998-07-05