レーザ拡散法による濃色PZT基盤微細クラックインプロセス自動検出技術

概要

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An automatic in-process detection system for narrow and short cracks in dark PZT plates used for piezoelectric parts has been developed. A crack in a dark PZT plate is difficult to detect because the diffuse reflectance of PZT is very low compared with that of an alurmina plate. With this system, the contrast and SN ratio in the crack detection signal are improved. The former is improved by using a polarized beam splitter for separating the incident light beam from the reflected light beam. The latter is improved by illuminating the PZT plate with the optimum radiant flux of a laser and by setting the detection window at an optimum position. The 0.2 mm-long cracks with 1 μm and 3 μm in width, are detected at 50% detection reliability and 100% detection reliability, respectively, using the laser scanning system developed for the in-process inspection.
公益社団法人精密工学会の論文
1998-06-05