パラレルメカニズムを用いた三次元座標測定機 (第3報) : アッベの原理

概要

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This study has proposed a new coordinate measuring machine (CMM) based on a spatial parallel mechanism consisting of closed loop link mechanism. In conventional CMM employing of XYZ mechanism, the motion error of the mechanism strongly influences the measurement accuracy because of violation of the Abbe' s principle which is the basis of the precision measurement. In this paper, the relationship between the link layout of proposed mechanism and the infuuence of jotnt runouts on the measurement error has been investigated analytically and experimentally. The obtained main results are as follows. (1) The joint runout in the scale direction strongly affects the measurement error. (2) Effects of the runouts except the scale direction are negligible when the measuring point is in the extensional direction of the scale. (3) The dispersion of measured value has decreased in above link layout. In conclusion, the Abbe' s principle can be applied in proposed parallel mechanism.
公益社団法人精密工学会の論文
2000-09-05