マルチワイヤソーの加工特性に及ぼすスラリーの影響

概要

論文の詳細を見る
Multi-wire saw which is one of the slicing methods of a silicon ingot uses slurry mixed free abrasive grains and dispersion oil. Composition of the slurry gives a remarkable influence on slicing characteristics in this slicing method. However, it has a tendency to be decided by a user's experience or a maker's recommendable value. This study aims at improving the slicing characteristics, and elucidating optimum condition of the slurry from the behavior of slurry viscosity and distribution of grain size used the multi-wire saw. For this purpose, not only the composition of the slurry is especially considered from a viewpoint of rheology, but also the slicing characteristics are examined when the grain size distribution is changed by mixing three kinds of abrasive grain. According to this result, it is clear that optimum slurry concentration is obtained by comparison with the theoretical slurry viscosity by Jeffery and measured viscosity. Furthermore, it is found that slicing efficiency is changed by the grain size distribution. In conclusion, the optimum conditions of both the slurry viscosity and the grain size are found for obtaining highest slicing performances.
公益社団法人精密工学会の論文
2000-10-05