修正キャリヤによるラップ定盤の面精度回復技術に関する研究 : 第2報, 加工圧力項を考慮した場合の修正特性

概要

論文の詳細を見る
In the previous report, the characteristics of the frictional distance were analyzed assuming that wear amounts between a lapping plate and correcting carrier are proportional to both the relative frictional distance and the working pressure. However, the working pressure applied changes as time passes: therefore, the present paper treats it analytically with wear characteristics of lapping plate by means of the correcting carrier considering the working pressure change. Correcting machining of the deteriorated lapping plate is carried out on the basis of this result. It is confirmed that this method is capable of recovering the accuracy of the deteriorated lapping plate in a comparatively flat manner.
社団法人日本機械学会の論文
1990-10-25