ウェーブレット変換によるZP干渉じまの解析

概要

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This paper describes the application of a wavelet transform as a method to analyze a partial fringe pattern. A zone-plate interferometer can measure errors in the shape of spherical or aspherical mirrors. There are no interference fringes outside mirrors. However, partial fringes are found near the edge of round mirrors. It is difficult to analyze partial fringes by the Fourier transform method, the method generally used to analyze the overall interference fringe pattern in an image. To overcome this disadvantage, a method is proposed that uses a wavelet transform instead of a Fourier transform to analyze such fringes. Analysis results are obtained as phases of fringes. By relating these phases to optical path differences, errors in the shape of the mirror are obtained automatically. This technique can be used for other types of fringe analysis as well.
公益社団法人精密工学会の論文
1999-03-05