大口径ゾーンプレート製作用レーザ描画装置の開発

概要

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In order to manufacture zone-plates with a large aperture, a laser beam writer by using an ultra precision lathe is developed. To coincide the axis of rotation of the main spindle and the original point of the zone plates, two methods are proposed. In one method a moire technique is used, and in the other method a mirror with a small hemisphere at the center is used. To increase the precise of zone plates, the edge lines of zone-plate gratings are written from the outer skirts of a photo-plate to the center by the laser beam spot with a small size. After that, inside of the edge lines is written by a laser beam spot with a large size. The spot size is varied by displacement of a microscope objective with a PZT device. A zone plate with a diameter of 100 mm is manufactured with the laser beam writer. A primary mirror with a diameter of 200 mm is measured by the zone plate.
公益社団法人精密工学会の論文
1999-11-05