硬 X 線集光用非球面反射鏡の加工に関する研究

概要

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This paper describes fabrication of aspheric mirrors for an X-ray microprobe which is available on a scanning X-ray microscopy and a local area X-ray analysis. A new X-ray microprobe optics, which improves spherical aberration of spherical mirrors optics (Kirkpatrick-Baez optics), is constructed by a pair of elliptic cylinder mirrors. Elliptic cylinder mirrors are fabricated by a numerically controlled diamond flycutting machine where tool cutting depth is dynamically controlled synchronizing to tool rotational angle. These mirrors have achieved a contour accuracy of 0.05 μm and a surface roughness of 1 nm which satisfies hard X-ray reflecting conditions. A focused X-ray spot of 4.2×5.5 μm was obtained at a wavelength of 2.0A^^° using synchrotron radiation from the KEK Photon Factory 2.5 GeV storage ring.
公益社団法人精密工学会の論文
1991-02-05