回折格子を用いた精密変位検出法

概要

論文の詳細を見る
A new precision displacement measuring method using a diffraction grating was investigated. In this paper, the measuring principle and the experimental results are described. The measuring principle is based on an interference phenomenon. Interference fringes are produced by superposing of a pair of positive and negative otder diffraction beams obtained by illuminating the grating perpendicularly with a monochromatic light beam. The displacement of the grating causes sinusoidal change in brightness of the fringes. The displacement measurement is carried out by counting the fringes photoelectronically. Experimental system was constructed by using a refiection grating with the period of l.43μm and a laser diode as the monochromatic light source. The measuring performance with the precision of O.1μm over the range of 20mm was confirmed in the experiment. An application to two-dimensional displacement measurement is also proposed.
公益社団法人精密工学会の論文
1983-06-05