改良走査電子顕微鏡 (SEM) による単結晶ダイヤモンド工具の切れ刃稜丸み半径の測定と解析

概要

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A measuring method for determining the sharpness or cutting edge radius for a diamond tool has been proposed and reviewed, to contribute to the advancement of ultra-precision diamond machining technology. In this research, a sectional curve of the cutting edge was figured out by processing image signals from a remodeled SEM with two secondary electron detectors. The research showed that a parabola was closer to the calculated result of the SEM signals, when the apex of the sectional curve, created by the SEM image signals, was approximated by a circle and a parabola. In addition, the cutting edge radius could be given in numerics based on a conic section displayed by a parameter using a simplex method. The measurement error analysis also revealed that the measurement error, according to the electron beam diameter, was almost negligible. The diamond edge shape was not altered by the Au film thickness, which is normally used to avoid an electrical charge before measurement. The cutting edge radius could be measured accurately. The cutting edge radius values for diamond tools thus measured were in the 20 to 45 nm range.
公益社団法人精密工学会の論文
1990-07-05