光学式びびり測定器の研究
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概要
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The chatter marks which may be sometimes generated in grinding or ultra-precision machining process can be graded by this instrument which is able to measure both geometrical waviness and fluctuation of glossiness from surface. In this instrument an optical lever and phototransistors are utilized for detecting the waviness and the fluctuation of the glossiness, so that measuring data can be collected accurately and reliably. The data of measured waviness patterns are processed by the computer, so that the influence of the fluctuation of the glossiness can be eliminated. Several test samples in the grinding and the ultra-precision machining process are described and also the samples of detecting the waviness within 0.01 μm are shown.
- 公益社団法人精密工学会の論文
- 1984-09-05
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