透過電子顕微鏡法によるダイヤモンド薄膜の加工損傷評価

概要

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In order to evaluate laser-induced damage in diamond thin films deposited by combustion flame method, microstructures and electron diffraction patterns of samples with/without YAG laser-cutting have been compared by conventional transmission electron microscopy and high-resolution electron microscopy. Microstructural observation has revealed that a diamond thin film with YAG laser-cutting shows local bright contrast, which may be attributable to the local lattice distortion due to laser-induced damage. In contrast, comparison of half-width of Bragg reflection has not shown an evident difference in diffraction intensity between two samples. This result implies that the lattice distortion in a diamond thin film with YAG laser-cutting localizes at very small area.diamond thin filmelectron microscopyYAG-laser cuttinglocal lattice misfit
東北大学の論文