誘導性パルスパワー電源を用いたオゾン生成効率のパルス幅依存性

概要

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Nanosecond pulse voltages of several pulse widths were applied to a cylindrical plasma reactor for ozone synthesis with high energy yield. Nanoseconds pulse voltages were produced by inductive energy storage system pulsed power generators using semiconductor opening switch (SOS) diodes. First recovery diodes were used as SOS diodes in the inductive energy storage system to produce short-pulsed high voltage with high-repetition rate. The short pulse voltage of 9.5 ns width and 33 kV peak voltage was produced at charging voltage of 15 kV and was applied to a 1 mm diameter center wire electrode in the plasma reactor. The copper cylinder of 19 mm inner diameter was used as outer electrode and was connected to a ground. The ozone yield of 271 g/kWh was obtained using the 9.5 ns width pulse voltage at synthesized 412 ppm of ozone concentration. The yield 271 g/kWh was more than twice as much as the yield 114 g/kWh at 401 ppm using a 60 ns pulse voltage.
2010-06-01