Silicon-containing Bilayer Resist Based on a Single Component Nonchemically Amplified Resist System
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概要
- 論文の詳細を見る
- 2008-09-05
著者
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Park Ji
Department of Herbology, College of Oriental Medicine, Daegu Haany University
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Kim Jin-baek
Department Of Chemistry And School Of Molecular Science (bk21) Korea Advanced Institute Of Science A
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Kim Jin-baek
Department Of Advanced Materials Engineering Korea Advanced Institute Of Science And Technology
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Park Ji
Department Of Biotechnology Pukyong National University
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Kim Jin-baek
Department Of Chemistry And School Of Molecular Science (bk21) Korea Advanced Institute Of Science A
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Park Ji
Department Of Chemistry And School Of Molecular Science (bk21) Korea Advanced Institute Of Science A
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PARK Ji
Department of Biomedical Engineering, College of Biomedical Science & Engineering, Inje University
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