Adhesion Enhancement of Norbornene Polymers with Lithocholate Substituents for 193-nm Resists
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概要
- 論文の詳細を見る
- Society of Polymer Scienceの論文
- 2004-01-15
著者
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Kim Jin-baek
Department Of Chemistry And School Of Molecular Science (bk21) Korea Advanced Institute Of Science A
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JANG Ji-Hyun
Department of Chemistry, School of Molecular Science (BK-21), and Center for Advanced Functional Pol
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Jang Ji-hyun
Department Of Chemistry School Of Molecular Science (bk-21) And Center For Advanced Functional Polym
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Kim Jin-baek
Department Of Chemistry School Of Molecular Science (bk21) And Center For Advanced Functional Polyme
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Kim Jin-baek
Department Of Advanced Materials Engineering Korea Advanced Institute Of Science And Technology
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Jang Ji-hyun
Department Of Chemistry School Of Molecular Science (bk21) And Center For Advanced Functional Polyme
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Choi Jae-hak
Department Of Chemistry School Of Molecular Science (bk21) And Center For Advanced Functional Polyme
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Choi Jae-hak
Department Of Advanced Materials Engineering Korea Advanced Institute Of Science And Technology
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KO Jong-Sung
Department of Advanced Materials Engineering, Korea Advanced Institute of Science and Technology
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LEE Bum-Wook
Samsung SDI Co. Ltd.
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Ko Jong-sung
Department Of Advanced Materials Engineering Korea Advanced Institute Of Science And Technology
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- Adhesion Enhancement of Norbornene Polymers with Lithocholate Substituents for 193-nm Resists