A Novel Patterning Method of Low-resistivity Metals
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概要
- 論文の詳細を見る
- 2005-01-05
著者
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Kim Jin-baek
Department Of Chemistry And School Of Molecular Science (bk21) Korea Advanced Institute Of Science A
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Song Ki-yong
Electronic Material Lab. Samsung Advanced Institute Of Technology
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Kim Jin-baek
Department Of Advanced Materials Engineering Korea Advanced Institute Of Science And Technology
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Son Hae-jung
Electronic Material Lab. Samsung Advanced Institute Of Technology
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Noh Chang-ho
Electronic Material Lab. Samsung Advanced Institute Of Technology
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KIM Jin-Young
Electronic Material Lab., Samsung Advanced Institute of Technology
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HWANG Ok-Chae
Electronic Material Lab., Samsung Advanced Institute of Technology
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BYK T.
Electronic Material Lab., Samsung Advanced Institute of Technology
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SOKOLOV V.
Research Institute for Physical and Chemical Problems, Belarussian State University
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Hwang Ok-chae
Electronic Material Lab. Samsung Advanced Institute Of Technology
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Byk T.
Electronic Material Lab. Samsung Advanced Institute Of Technology
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Kim Jin-young
Electronic Material Lab. Samsung Advanced Institute Of Technology
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Sokolov V.
Research Institute For Physical And Chemical Problems Belarussian State University
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