High quality Si_<1-x>Ge_x nanowire and its application to MOSFET integrated with HfO_2/TaN/Ta gate stack
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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LEE S.
Silicon Nano Device Lab., National University of Singapore
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KWONG D.
Institute of Microelectronics
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Lee S.
Silicon Nano Device Lab Department Of Ece National University Of Singapore
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YANG W.
Silicon Nano Device Lab., Dept. of Electrical & Computer Engineering, National University of Singapo
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WHANG S.
Silicon Nano Device Lab., Dept. of Electrical & Computer Engineering, National University of Singapo
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LIM S.
Silicon Nano Device Lab., Dept. of Electrical & Computer Engineering, National University of Singapo
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CHO B.
Silicon Nano Device Lab., Dept. of Electrical & Computer Engineering, National University of Singapo
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Lee S.
Silicon Nano Device Lab. Dept. Of Electrical & Computer Engineering National University Of Singa
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Whang S.
Silicon Nano Device Lab. Dept. Of Electrical & Computer Engineering National University Of Singa
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