Fabrication of nanoscaled-schottky diodes based on metal silicide/silicon nanowire with scanning probe lithography and Wet etching and its electrical characterization
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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TSAI S.
Department of Mechanical Engineering, National Central University
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SHEU J.
Institute of Electro-Optical Science & Engineering, National Cheng Kung University
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Lien C.
Institute Of Electrical Engineering National Tsing Hua University
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YEH S.
Institute of Electrical Engineering, National Tsing Hua University
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Yeh S.
Institute Of Electrical Engineering National Tsing Hua University
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Tsai S.
Department Of Electrical Engineering National Chi Nan University
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Sheu J.
Institute Of Nanotechnology National Chaio Tung University
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